INITIAL EVAPORATION RATES FROM GAAS DURING RAPID THERMAL-PROCESSING

被引：17

作者：

HAYNES, TE ^{[1
]}

CHU, WK ^{[1
]}

ASELAGE, TL ^{[1
]}

PICRAUX, ST ^{[1
]}

机构：

[1] SANDIA NATL LABS,ALBUQUERQUE,NM 87185

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 63卷 / 04期

关键词：

D O I：

10.1063/1.339976

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1168 / 1176

页数：9

共 21 条

[1] VAPOR PRESSURES AND PHASE EQUILIBRIA IN GA-AS SYSTEM [J].

ARTHUR, JR .

JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1967, 28 (11) :2257-&

[2] INTERACTION OF GA AND AS2 MOLECULAR BEAMS WITH GAAS SURFACES [J].

ARTHUR, JR .

JOURNAL OF APPLIED PHYSICS, 1968, 39 (08) :4032-&

[3] TEMPERATURE RESPONSE OF GAAS IN A RAPID THERMAL ANNEALING SYSTEM [J].

BLOCK, TR ;

FARLEY, CW ;

STREETMAN, BG .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1986, 133 (02) :450-451

[4] TRANSIENT THERMAL ANNEALING IN GAAS [J].

DAVIES, DE .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) :387-394

[5]

ELLIOTT RP, 1965, CONSTITUTION BINAR S, P5430

[6] INTERACTION KINETICS OF AS2 AND GA ON [100] GAAS SURFACES [J].

FOXON, CT ;

JOYCE, BA .

SURFACE SCIENCE, 1977, 64 (01) :293-304

[7] EVAPORATION OF GAAS UNDER EQUILIBRIUM AND NONEQUILIBRIUM CONDITIONS USING A MODULATED BEAM TECHNIQUE [J].

FOXON, CT ;

HARVEY, JA ;

JOYCE, BA .

JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1973, 34 (10) :1693-&

[8]

Hansen M., 1958, J ELECTROCHEM SOC, DOI DOI 10.1149/1.2428700

[9] INITIAL DECOMPOSITION OF GAAS DURING RAPID THERMAL ANNEALING [J].

HAYNES, TE ;

CHU, WK ;

ASELAGE, TL ;

PICRAUX, ST .

APPLIED PHYSICS LETTERS, 1986, 49 (11) :666-668

[10]

Kuzuhara M., 1984, MATER RES STAND, V23, P651, DOI [10.1557/PROC-23-651, DOI 10.1557/PROC-23-651]

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