FUNDAMENTAL INVESTIGATIONS IN PLASMA MODIFICATION OF POLYMERS

被引:40
作者
MEICHSNER, J
NITSCHKE, M
ROCHOTZKI, R
ZEUNER, M
机构
[1] Technische Universität Chemnitz-Zwickau, Institut für Physik
关键词
PLASMA; POLYMER; IR SPECTROSCOPY; ELLIPSOMETRY; MICROGRAVIMETRY;
D O I
10.1016/0257-8972(95)08324-3
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Polyethylene and polystyrene as model polymers are treated in a low temperature plasma of oxygen, nitrogen, tetrafluoromethane, and argon. The modification, incorporation of plasma particles and plasma etching are studied by means of in situ Fourier transform IR spectroscopy, spectroscopic ellipsometry and in situ microgravimetry. Major changes in the surface region are observed after a few seconds of treatment time in the plasma.
引用
收藏
页码:227 / 231
页数:5
相关论文
共 17 条
[1]  
Beamson G., 1992, HIGH RESOLUTION XPS, DOI 10.1021/ED070PA25.5
[2]  
BORN M, 1932, OPTIK, P502
[3]  
GOSE K, 1994, THESIS TU CHEMNITZ Z
[4]   INFRARED STUDY OF ADSORBED MOLECULES ON METAL SURFACES BY REFLECTION TECHNIQUES [J].
GREENLER, RG .
JOURNAL OF CHEMICAL PHYSICS, 1966, 44 (01) :310-&
[5]  
HARRICK NJ, 1975, INTERNAL REFLECTION
[6]  
KLOCECK P, 1991, HDB INFRARED OPTICAL
[7]  
Lien-Vien D., 1991, HDB INFRARED RAMAN C
[8]   PLASMA SURFACE MODIFICATION OF POLYMERS FOR IMPROVED ADHESION - A CRITICAL-REVIEW [J].
LISTON, EM ;
MARTINU, L ;
WERTHEIMER, MR .
JOURNAL OF ADHESION SCIENCE AND TECHNOLOGY, 1993, 7 (10) :1091-1127
[9]  
MEICHSNER J, 1984, WISS Z TECH HOCHSCH, V5, P672
[10]   HIGH-FIELD PHENOMENA IN POLY-P-XYLYLENE THIN-FILMS - EFFECTS OF PLASMA TREATMENT [J].
MORI, T ;
MIZUTANI, T ;
IEDA, M .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1989, 22 (10) :1518-1522