DEPOSITION OF TANTALUM FILMS WITH OPEN-ENDED VACUUM SYSTEM

[1] BERRY RW, 1960, P 4 NAT CONV MIL EL, P214

[2] BERRY RW, 1963, BELL LABS RECORD, P46

[3] CALBICK CJ, 1962, 9 NAT VAC SAVC 3, P81

[4] CHARSCHAN SS, 1963, CONTINUOUS VACUUM PR, P9

[5] FISHER JS, PRIVATE COMMUNIVATIO

[6] GERSTENBERG D, 1962, P ELECTRON COMPONETS, P57

[7] MCLEAN DA, 1959, IRE WESCON CONVENT 6, V3, P87

[8] SCHWARTZ N, 1961, 8 T NAT VAC SAVC 2, P836

[1] BERRY RW, 1960, P 4 NAT CONV MIL EL, P214

[2] BERRY RW, 1963, BELL LABS RECORD, P46

[3] CALBICK CJ, 1962, 9 NAT VAC SAVC 3, P81

[4] CHARSCHAN SS, 1963, CONTINUOUS VACUUM PR, P9

[5] FISHER JS, PRIVATE COMMUNIVATIO

[6] GERSTENBERG D, 1962, P ELECTRON COMPONETS, P57

[7] MCLEAN DA, 1959, IRE WESCON CONVENT 6, V3, P87

[8] SCHWARTZ N, 1961, 8 T NAT VAC SAVC 2, P836