TEMPERATURE STAGE FOR ULTRALOW-TEMPERATURE OXYGEN PLASMA ASHING (L2TA)

被引：1

作者：

BERNIUS, MT

BRENNA, JT

MORRISON, GH

机构：

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1985年 / 56卷 / 11期

关键词：

D O I：

10.1063/1.1138424

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：2084 / 2087

页数：4

共 10 条

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