LASER-STIMULATED PHOTOCATHODE ELECTRON-BEAM PROBER FOR 15PS RESOLUTION WAVE-FORM MEASUREMENTS

被引：3

作者：

FIXL, AJ

JENKINS, KA

机构：

[1] Schlumberger Technologies, CA 95110 telephone: 408-437-5282, 1601 Technology Drive, San Jose

[2] IBM Research Division, T.J. Watson Research Center, Yorktown Heights

来源：

MICROELECTRONIC ENGINEERING | 1994年 / 24卷 / 1-4期

关键词：

D O I：

10.1016/0167-9317(94)90057-4

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In order to overcome the bandwidth limitations of conventional electron beam probe systems a new instrument was developed which uses laser-stimulated photoemission to generate 15ps electron sampling pulses. Results from probing an ECL communication circuit with rise times of 100ps and stage-to-stage delays of less than 50ps demonstrates a typical application.

引用

页码：81 / 88

页数：8

共 4 条

[1]

Richardson, E-Beam Probing for VLSI Circuit Debug, VLSI Systems Design, (1987)

[2]

May, Halbout, Chiu, Noncontact High-Speed Waveform Measurements with the Picosecond Photoelectron Scanning Electron Microscope, IEEE Journal of Quantum Electronics, 24, 2, pp. 234-239, (1988)

[3]

Nakamae, Fujioka, Ura, Transit Time Effect on Voltage Contrast in the Stroboscopic Scanning Electron Microscope, Scanning Microscopy, 2, 2, pp. 821-826, (1988)

[4]

Shin, Immediato, An Experimental 5-Gb/s 16×16 Si-Bipolar Cross-point Switch, IEEE Journal of Solid-State Circuits, 27, pp. 1812-1818, (1992)

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