FINE-STRUCTURE INVESTIGATIONS OF DIAMOND AND DIAMOND-LIKE CARBON-FILMS USING RAMAN-SPECTROSCOPY

The Raman characterisation of crystalline diamond films prepared by the plasma torch system and diamond-like carbon (DLC) deposited using the ion-beam-assisted DC magnetron technique is presented. The spectra are first discussed in terms of quality of diamond samples and are used to define the best set of synthesis parameters. The broadening of diamond line is discussed in terms of a distribution of stresses and of crystallite size effect. The DLC spectra are discussed as a function of the H content and of the density of the films, their second-order spectra have been investigated. Because of the resonant nature of the 1570 cm-1 component and the strong second-order band at about 3150 cm-1, the presence of graphite-like entities is discussed. © 1992.