SILICON TECHNOLOGY IN ION DETECTION - A HIGH-RESOLUTION DETECTOR ARRAY

被引：17

作者：

BIRKINSHAW, K

LANGSTAFF, DP

机构：

[1] Department of Physics, University of Wales Aberystwyth, Aberystwyth

来源：

INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PROCESSES | 1994年 / 132卷 / 03期

关键词：

DETECTOR; ARRAY; ION; SILICON; MASS SPECTROMETER;

D O I：

10.1016/0168-1176(93)03940-N

中图分类号：

O64 [物理化学（理论化学）、化学物理学]; O56 [分子物理学、原子物理学];

学科分类号：

070203 ; 070304 ; 081704 ; 1406 ;

摘要：

A new ion detector array integrated on a silicon chip with a high spatial resolution has been designed at Aberystwyth. Integrated circuits are mounted on a ceramic substrate beneath a microchannel plate electron multiplier giving a small, light, low power, very low noise module. An array containing 384 detectors with a spatial resolution of 25 microns has been fully tested and test results are presented.

引用

页码：193 / 206

页数：14