KINETIC-ANALYSIS OF ELECTROLESS DEPOSITION OF COPPER

被引:72
作者
SCHUMACHER, R [1 ]
PESEK, JJ [1 ]
MELROY, OR [1 ]
机构
[1] IBM CORP,RES LAB,SAN JOSE,CA 95193
关键词
D O I
10.1021/j100266a037
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
引用
收藏
页码:4338 / 4342
页数:5
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