LOW-PRESSURE SENSORS EMPLOYING BOSSED DIAPHRAGMS AND PRECISION ETCH-STOPPING

被引：26

作者：

MALLON, JR

POURAHMADI, F

PETERSEN, K

BARTH, P

VERMEULEN, T

BRYZEK, J

机构：

[1] NovaSensor, Fremont, CA 94539

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1990年 / 21卷 / 1-3期

关键词：

D O I：

10.1016/0924-4247(90)85018-Y

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper describes the various critical factors required for the successful design and production of low-pressure silicon micromachined sensors with ranges from 1 psi to 2 in of water. Described in some detail are mechanical modeling and process design and control-related issues. Particular attention is paid to the specialized geometries required for achieving good linearity at low pressures. An example of a plastic housed frequency output sensor with test data is shown. © 1990.

引用

页码：89 / 95

页数：7