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LOW-ENERGY ION-BEAM WORK FOR THE PREPARATION OF VARIOUS DELICATE ISOTOPIC SAMPLES AS WELL AS FOR SPUTTERING AND IMPLANTATION TASKS

被引：9
作者：
HECHTL, E
机构：
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1987年 / 26卷 / 1-3期
关键词：
D O I：
10.1016/0168-583X(87)90730-0
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：37 / 43
页数：7
相关论文
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[7]   SPUTTERING OF TITANIUM AND ZIRCONIUM BY FUSION PLASMA IMPURITY IONS [J].
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[8]   RETARDATION COLLECTOR SYSTEM FOR SPECIAL TARGET PREPARATION WITH AN ISOTOPE SEPARATOR [J].
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[9]  
HECHTL E, 1980, P S SPUTTERING, P834
[10]  
HECHTL E, 1984, J NUCL MATER, V122, P1431
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