PREPARATION OF PBTIO3 THIN-FILMS BY ION-ASSISTED AND PHOTOASSISTED EVAPORATION

被引:4
作者
HAYASHI, S
IIJIMA, K
HIRAO, T
机构
[1] Central Research Laboratories, Matsushita Electric Industrial Co Ltd, Moriguchi, Osaka, 570
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1991年 / 30卷 / 12B期
关键词
PBTIO3; ION-ASSISTED AND PHOTOASSISTED EVAPORATION; PEROVSKITE; EXCIMER LASER;
D O I
10.1143/JJAP.30.3806
中图分类号
O59 [应用物理学];
学科分类号
摘要
PbTiO3 films were grown on MgO substrates by the recently developed ion- and photoassisted evaporation technique, Pb and Ti were evaporated from electron-beam-heated metal sources under the irradiation of an oxygen ion beam and excimer laser beam for the ion activation and for the photoactivation, respectively. Crystal structure of the films was significantly affected by ion energy, ion current, laser pulse energy and repetition rate. The substrate temperature required for in-situ preparation of perovskite PbTiO3 could be lowered to 450-degrees-C by ion-assisted evaporation and to room temperature by ion- and photoassisted evaporation.
引用
收藏
页码:3806 / 3809
页数:4
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