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AN ELECTRON IMAGE PROJECTION STEPPER

被引：1
作者：
LIVESAY, WR
ANDERSON, LB
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1986年 / 4卷 / 01期
关键词：
D O I：
10.1116/1.583355
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：100 / 104
页数：5
相关论文
共 7 条
[1]   INTEGRATED-CIRCUIT PRODUCTION WITH ELECTRON-BEAMS [J].
LIVESAY, WR .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1973, 10 (06) :1028-1032
[2]   IMAGING AND ALIGNMENT TESTS ON AN ELECTRON PROJECTION SYSTEM [J].
LIVESAY, WR .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1978, 15 (03) :1022-1027
[3]  
LIVESAY WR, 1971, 11TH P S EL ION LAS, P505
[4]   AN ELECTRON IMAGING SYSTEM FOR FABRICATION OF INTEGRATED CIRCUITS [J].
OKEEFFE, TW ;
VINE, J ;
HANDY, RM .
SOLID-STATE ELECTRONICS, 1969, 12 (11) :841-&
[5]   ELECTRON IMAGE PROJECTOR WITH AUTOMATIC ALIGNMENT [J].
SCOTT, JP .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1975, ED22 (07) :409-413
[6]   DEVELOPMENTS IN ELECTRON IMAGE PROJECTION [J].
WARD, R .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (06) :1830-1833
[7]   FLATNESS, CONTRAST, AND RESOLUTION CONSIDERATIONS OF CATHODE PROJECTION MICROFABRICATION SYSTEMS [J].
WARDLY, GA .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (06) :1313-1316
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