PARAMETRIC OPTIMIZATION OF MULTILEVEL DIFFRACTIVE OPTICAL-ELEMENTS BY ELECTROMAGNETIC THEORY

被引：54

作者：

NOPONEN, E ^{[1
]}

TURUNEN, J ^{[1
]}

VASARA, A ^{[1
]}

机构：

[1] HERIOT WATT UNIV,DEPT PHYS,EDINBURGH EH13 4AS,SCOTLAND

来源：

APPLIED OPTICS | 1992年 / 31卷 / 28期

关键词：

MICROOPTICS; HOLOGRAPHIC OPTICAL ELEMENTS; DIFFRACTION;

D O I：

10.1364/AO.31.005910

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

To maximize the efficiency of dielectric diffractive optical elements, we optimized the local groove shape using the rigorous diffraction theory of multilevel surface-relief gratings.

引用

页码：5910 / 5912

页数：3

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