AUTOMATIC TEMPERATURE COMPENSATING APPARATUS FOR MEASUREMENT OF THIN-FILMS DURING DEPOSITION

被引：3

作者：

GENEROSI, R

MIRIAMETRO, A

机构：

来源：

关键词：

D O I：

10.1063/1.1137159

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：1470 / 1471

页数：2

共 10 条

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[3]

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[4]

MAISSEL, HDB THIN FILM TECHNO, P1

[5]

MILLER, 1978, J APPL PHYS, V39, P4589

[6]

MILLER, 1978, J APPL PHYS, V39, P5815

[7]

PULKER HK, 1969, Patent No. 1558966

[8]

PULKER HK, 1967, Patent No. 440731

[9]

PULKER HK, 1971, VIDE, V154, P150

SAUERBREY, G .

ZEITSCHRIFT FUR PHYSIK, 1959, 155 (02) :206-222