MOLECULAR-BEAM EPITAXY WITH SYNCHRONIZATION OF NUCLEATION

被引：47

作者：

MARKOV, VA ^{[1
]}

PCHELYAKOV, OP ^{[1
]}

SOKOLOV, LV ^{[1
]}

STENIN, SI ^{[1
]}

STOYANOV, S ^{[1
]}

机构：

[1] BULGARIAN ACAD SCI,INST PHYS CHEM,BU-1040 SOFIA,BULGARIA

来源：

SURFACE SCIENCE | 1991年 / 250卷 / 1-3期

关键词：

D O I：

10.1016/0039-6028(91)90725-8

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

A new MBE technique based on the possibility to maintain undamping RHEED oscillations by periodic increase of the surface supersaturation synchronized with the oscillations is presented. Surface supersaturation may be increased by any way that is suitable for a particular case. The technique has been referred to by the authors as MBE with nucleation synchronization and allows epistructures of any thickness to be grown with in situ control of their properties by RHEED or automatic ellipsometry. It can be applied both to elementary semiconductors and compounds like A(III)B(V), A(II)B(VI), etc.

引用

页码：229 / 234

页数：6

共 12 条

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