A STUDY OF TEXTURE IN DIAMOND FILMS AS FUNCTIONS OF METHANE CONCENTRATION DURING CHEMICAL-VAPOR-DEPOSITION AND POSTGROWTH HYDROGEN TREATMENT

We have studied effects of hydrogen on texture in diamond films grown by hot filament assisted chemical vapor deposition by utilizing x-ray diffraction (XRD), We present results for the relative intensities of the XRD peaks originating from the (111), (220), and (400) crystallographic planes as functions of CH4/H-2 makeup during growth and post-growth H-2 treatment of the films. The texture of the films can be controlled by varying composition of the CH1/H-2 mixture during growth and also by subjecting films to hydrogen treatment, The complementary characterization of these film?, by XRD, Raman spectroscopy, and positron annihilation techniques exemplifies a correlation among film texture, diamond content, and density of the microvoids in the films.