MOLECULAR-BEAM DISTRIBUTIONS FROM HIGH-RATE SOURCES

被引：13

作者：

JACKSON, SC ^{[1
]}

BARON, BN ^{[1
]}

ROCHELEAU, RE ^{[1
]}

RUSSELL, TWF ^{[1
]}

机构：

[1] UNIV DELAWARE,DEPT CHEM ENGN,NEWARK,DE 19716

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 05期

关键词：

D O I：

10.1116/1.572945

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1916 / 1920

页数：5

共 11 条

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[6]

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ROCHELEAU, RE ;

BARON, BN ;

RUSSELL, TWF .

AICHE JOURNAL, 1982, 28 (04) :656-662

[8] ANGULAR-DISTRIBUTION OF MOLECULAR-BEAMS FROM MODIFIED KNUDSEN CELLS FOR MOLECULAR-BEAM EPITAXY [J].

SHEN, LYL .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1978, 15 (01) :10-12

[9]

STICKNEY RE, 1968, J VAC SCI TECHNOL, V4, P10

[10] FILM THICKNESS DISTRIBUTION AT OBLIQUE EVAPORATION [J].

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ANDERSSON, TG .

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