MAGNETIC AND STRUCTURAL-PROPERTIES OF MAGNETRON SPUTTERED COCR THIN-FILMS

被引:14
作者
HOFFMANN, H [1 ]
KOCHANOWSKY, L [1 ]
MANDL, H [1 ]
KASTNER, K [1 ]
MAYR, M [1 ]
MUNZ, WD [1 ]
ROLL, K [1 ]
机构
[1] LEYBOLD HERAEUS GMBH,D-6450 HANAU,FED REP GER
关键词
D O I
10.1109/TMAG.1985.1063954
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:1432 / 1434
页数:3
相关论文
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