SURFACE PROFILOMETRY BASED ON FRINGING CAPACITANCE MEASUREMENT

[1] ALBRECHT LJ, 1983, THESIS U WASHINGTON

[2] ARECCHI FD, 1979, OPTICAL COMMUNIC DEC, P263

[3] MEASUREMENT OF SURFACE TEXTURE AND TOPOGRAPHY BY DIFFERENTIAL LIGHT-SCATTERING [J]. WEAR, 1979, 57 (01) : 93 - 105

[4] CLEMENS JK, 1978, RCA REV MAR, P33

[5] DIMASSIMO DV, 1980, RCA COSMOS SSD250B I, P631

[6] FROMSON RE, 1977, MANUFACTURING EN JUL, P41

[7] GARRATT JD, 1979, J PHYSICS E, P563

[8] GOROG I, 1978, RCA REV MAR, P162

[9] HACKETT CF, 1981, RCA ENG NOV, P26

[10] KASDAN HL, 1979, OPTICAL ENG SEP, P496

[1] ALBRECHT LJ, 1983, THESIS U WASHINGTON

[2] ARECCHI FD, 1979, OPTICAL COMMUNIC DEC, P263

[3] MEASUREMENT OF SURFACE TEXTURE AND TOPOGRAPHY BY DIFFERENTIAL LIGHT-SCATTERING [J]. WEAR, 1979, 57 (01) : 93 - 105

[4] CLEMENS JK, 1978, RCA REV MAR, P33

[5] DIMASSIMO DV, 1980, RCA COSMOS SSD250B I, P631

[6] FROMSON RE, 1977, MANUFACTURING EN JUL, P41

[7] GARRATT JD, 1979, J PHYSICS E, P563

[8] GOROG I, 1978, RCA REV MAR, P162

[9] HACKETT CF, 1981, RCA ENG NOV, P26

[10] KASDAN HL, 1979, OPTICAL ENG SEP, P496