A SELF-ALIGNMENT PROCESS FOR AMORPHOUS-SILICON THIN-FILM TRANSISTORS

被引：20

作者：

KODAMA, T

TAKAGI, N

KAWAI, S

NASU, Y

YANAGISAWA, S

ASAMA, K

机构：

来源：

ELECTRON DEVICE LETTERS | 1982年 / 3卷 / 07期

关键词：

D O I：

10.1109/EDL.1982.25532

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：187 / 189

页数：3

共 12 条

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[9] AMORPHOUS SILICON-SILICON NITRIDE THIN-FILM TRANSISTORS [J].

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[10] APPLICATION OF AMORPHOUS-SILICON FIELD-EFFECT TRANSISTORS IN INTEGRATED-CIRCUITS [J].

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