PHOTOACOUSTIC MICROSCOPIC (PAM) IMAGES OF SOME GAAS WAFERS

被引:7
作者
KASAI, M [1 ]
SAWADA, T [1 ]
GOHSHI, Y [1 ]
机构
[1] UNIV TOKYO,FAC ENGN,DEPT IND CHEM,7-3-1 HONG,BUNKYO KU,TOKYO 113,JAPAN
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1985年 / 24卷
关键词
D O I
10.7567/JJAPS.24S1.220
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:220 / 221
页数:2
相关论文
共 9 条
[1]   ULTRASONIC-IMAGING IN SCANNING ELECTRON-MICROSCOPY [J].
CARGILL, GS .
NATURE, 1980, 286 (5774) :691-693
[2]   THERMAL CONDUCTIVITY OF GAAS AND GAAS1-XPX LASER SEMICONDUCTORS [J].
CARLSON, RO ;
SLACK, GA ;
SILVERMAN, SJ .
JOURNAL OF APPLIED PHYSICS, 1965, 36 (02) :505-+
[3]  
Ikoma T., 1982, OYO BUTURI, V51, P205
[4]   THERMAL WAVE IMAGING OF MULTI-LAYERED FILMS [J].
KIRKBRIGHT, GF ;
LIEZERS, M ;
MILLER, RM ;
SUGITANI, Y .
ANALYST, 1984, 109 (04) :465-&
[5]  
NAKAMURA H, 1984, JPN J APPL PHYS 2, V23, pL1, DOI 10.1143/JJAP.23.L1
[6]   THERMAL-WAVE DEPTH PROFILING - THEORY [J].
OPSAL, J ;
ROSENCWAIG, A .
JOURNAL OF APPLIED PHYSICS, 1982, 53 (06) :4240-4246
[7]   THERMAL WAVE MICROSCOPY WITH PHOTO-ACOUSTICS [J].
ROSENCWAIG, A .
JOURNAL OF APPLIED PHYSICS, 1980, 51 (04) :2210-2211
[8]  
ROSENCWAIG A, 1982, SOLID STATE TECHNOL, V25, P91
[9]  
Shimizu H., 1984, Journal of the Spectroscopical Society of Japan, V33, P249, DOI 10.5111/bunkou.33.249