EFFECTS OF BOUNDARY-CONDITIONS ON THE FLOW AND HEAT-TRANSFER IN A ROTATING-DISK CHEMICAL VAPOR-DEPOSITION REACTOR

被引：57

作者：

EVANS, G ^{[1
]}

GREIF, R ^{[1
]}

机构：

[1] UNIV CALIF BERKELEY,DEPT MECH ENGN,BERKELEY,CA 94720

来源：

NUMERICAL HEAT TRANSFER | 1987年 / 12卷 / 02期

关键词：

CHEMICAL EQUIPMENT - Reactors - HEAT TRANSFER - Equipment - INTEGRATED CIRCUIT MANUFACTURE - Chemical Vapor Deposition;

D O I：

10.1080/10407788708913584

中图分类号：

O414.1 [热力学];

学科分类号：

摘要：

Numerical solutions of the Navier-Stokes and energy equations have been obtained to predict the fluid flow, temperature profiles, and heat transfer in a rotating disk reactor. The effects of buoyancy, variable properties, and finite geometry have been included for helium. It is shown that recirculation of the gas can be reduced or eliminated by increasing the uniform velocity at the inlet of the reactor above the asymptotic value for a one-dimensional, variable-properties, infinite rotating disk. This is true for both adiabatic and isothermal reactor walls.

引用

页码：243 / 252

页数：10