共 17 条
[1]
BERGMAN C, 1986, 1985 P ASM C APPL IO
[2]
NEW INSTRUMENTATION AND TECHNIQUES TO MONITOR CHEMICAL SURFACE-REACTIONS ON SINGLE-CRYSTALS OVER A WIDE PRESSURE RANGE (10-8-105 TORR) IN SAME APPARATUS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1976, 13 (05)
:1091-1096
[3]
BOXMAN RL, 1985, THIN SOLID FILMS, V139, P41
[4]
BROWN IG, 1988, J APPL PHYS, V63, P4891
[5]
Chen F F, 1965, PLASMA DIAGNOSTIC TE, P113
[7]
GODECHOT X, 1991, MATER RES SOC SYMP P, V190, P95
[8]
JOHNSON PC, 1989, PLAT SURF FINISH, V76, P30
[9]
KLABUNDE KJ, 1975, CHEM TECH, V6, P624
[10]
LAFFERTY JM, 1980, VACUUM ARCS THEORY A