MEASUREMENT OF PRESSURE FOR DETERMINATION OF SPEED OF HIGH-VACUUM PUMPS

被引：5

作者：

BUHL, R

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1966年 / 3卷 / 03期

关键词：

D O I：

10.1116/1.1492458

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：83 / +

页数：1

共 26 条

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[7] MEASUREMENT AND COMPARISON OF PUMPING SPEEDS [J].

DAYTON, BB .

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[8]

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[9]

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[10]

DEGRAS DA, 1960, ADVAN VAC SCI TECHNO, V1, P315