CHARACTERIZATION OF HYDROXYAPATITE LASER-ABLATION PLUMES BY FAST INTENSIFIED CCD IMAGING

被引:14
作者
SERRA, P
PALAU, J
VARELA, M
ESTEVE, J
MORENZA, JL
机构
[1] Departament de Fisica Aplicada i Electrònica, Universitat de Barcelona, Avda, E-08028, Barcelona
关键词
D O I
10.1557/JMR.1995.0473
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
ArF excimer laser pulses (193 nm, 20 ns, 150 mJ) have been focused on a hydroxyapatite (HA) target in similar conditions to those normally used for thin film deposition. Fast intensified CCD images of HA laser ablation plumes have been taken in vacuum and under different water vapor pressures ranging from 0.01 mbar to 1 mbar. Images of HA ablation in vacuum have shown a plume freely expanding at a constant velocity of 2.3 X 10(6) cm/s. HA ablation under a water vapor pressure of 0.01 mbar has revealed an expansion behavior very similar to that of ablation in vacuum. Images taken under a water vapor pressure of 0.1 mbar have shown the formation of a shock structure in the plume. Finally, HA ablation under a water vapor pressure of 1 mbar has revealed the development of some irregularities in the shape of the plume.
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页码:473 / 478
页数:6
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