PREPARATION AND CHARACTERIZATION OF ALUMINA FILMS BY SOL-GEL METHOD

被引：13

作者：

BRUSASCO, R ^{[1
]}

KERSHAW, R ^{[1
]}

BAGLIO, J ^{[1
]}

DWIGHT, K ^{[1
]}

WOLD, A ^{[1
]}

机构：

[1] GTE LABS INC,WALTHAM,MA 02254

来源：

MATERIALS RESEARCH BULLETIN | 1986年 / 21卷 / 03期

关键词：

ALUMINA; -; Synthesis; GELS; Hydrolysis;

D O I：

10.1016/0025-5408(86)90186-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A low-temperature sol-gel method was used to apply a thin film of alumina on indium phosphide substrates by spin application. The resultant films were characterized by ellipsometry and electron microscopy to determine thickness and porosity. The current-voltage characteristics of the films were measured as a function of annealing temperature.

引用

页码：301 / 306

页数：6

共 6 条

[1] DIELECTRIC FUNCTIONS AND OPTICAL-PARAMETERS OF SI, GE, GAP, GAAS, GASB, INP, INAS, AND INSB FROM 1.5 TO 6.0 EV
ASPNES, DE
STUDNA, AA
[J]. PHYSICAL REVIEW B, 1983, 27 (02) : 985 - 1009
[2] INP METAL-OXIDE SEMICONDUCTOR-DEVICES INCORPORATING AL2O3 DIELECTRICS CHEMICALLY VAPOR-DEPOSITED AT LOW-PRESSURE
CAMERON, DC
IRVING, LD
JONES, GR
WOODWARD, J
[J]. THIN SOLID FILMS, 1982, 91 (04) : 339 - 347
[3] CHEMICAL CLEANING OF INP SURFACES - OXIDE COMPOSITION AND ELECTRICAL-PROPERTIES
GUIVARCH, A
LHARIDON, H
PELOUS, G
HOLLINGER, G
PERTOSA, P
[J]. JOURNAL OF APPLIED PHYSICS, 1984, 55 (04) : 1139 - 1148
[4] KEIZER K, 1984, SCI CERAM, V12, P101
[5] INVESTIGATIONS OF POROUS OXIDES AS AN ANTI-REFLECTIVE COATING FOR GLASS SURFACES
YOLDAS, BE
[J]. APPLIED OPTICS, 1980, 19 (09): : 1425 - 1429
[6] YOLDAS BE, 1975, AM CERAM SOC BULL, V54, P289

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