A DIFFERENTIAL PRESSURE-RISE METHOD FOR MEASURING THE NET OUTGASSING RATES OF A SOLID MATERIAL AND FOR ESTIMATING ITS CHARACTERISTIC VALUES AS A GAS SOURCE

被引：12

作者：

YOSHIMURA, N

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 06期

关键词：

D O I：

10.1116/1.573274

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2177 / 2183

页数：7

共 66 条

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