APPLICATIONS OF MICROFABRICATION TECHNIQUES IN ELECTROCHEMICAL SENSOR DEVELOPMENT

被引：7

作者：

LIU, CC ^{[1
]}

机构：

[1] CASE WESTERN RESERVE UNIV,CTR ELECTR DESIGN,CLEVELAND,OH 44106

来源：

APPLIED BIOCHEMISTRY AND BIOTECHNOLOGY | 1993年 / 41卷 / 1-2期

关键词：

MICROFABRICATION TECHNIQUES; ELECTROCHEMICAL SENSOR DEVELOPMENT;

D O I：

10.1007/BF02918536

中图分类号：

Q5 [生物化学]; Q7 [分子生物学];

学科分类号：

071010 ; 081704 ;

摘要：

Electrochemical sensors have been used either as a whole or as an integral part of a chemical and biological sensing device, Microfabrication technology has been used in the development of electrochemical sensors. The recent advancement of micromachining techniques adds new impetus to electrochemical sensor development. Most noticable is the application of anisotropic chemical etching, plasma etching, sacrificial layer methods, and high aspect ratio X-ray lithography to enhance the opportunity to produce scientifically and commercially viable electrochemical sensors. Examples will be used to illustrate the potential of microfabrication and micromachining techniques in electrochemical sensor development.

引用

页码：99 / 107

页数：9

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