STUDY OF GAS-STREAM-ASSISTED LASER ABLATION OF COPPER

被引：1

作者：

GUO, HP

LOU, QH

机构：

[1] Shanghai Institute of Optics and Fine Mechanics, Academia Sinica, Shanghai, 201800

来源：

THIN SOLID FILMS | 1992年 / 218卷 / 1-2期

关键词：

D O I：

10.1016/0040-6090(92)90927-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

It has been found that a gas stream can improve the cutting-edge quality of laser ablation. In this letter, the investigation using a time resolved laser beam deflection technique of the blow-off wave of XeCl excimer laser ablation of copper plates is reported. The experimental results provide a physical explanation for improvement in the gas-stream-assisted laser ablation.

引用

页码：274 / 276

页数：3

共 6 条

[1]

BRINKMANN U, 1990, HIGHLIGHTS LAMBDA PH, P5

[2] THE STUDY OF THE PROCESSES OF LASER-INDUCED VAPORIZATION OF COPPER SURFACE BY TIME-RESOLVED LASER-BEAM DEFLECTION TECHNIQUE [J].