FIELD-EMISSION FROM SILICON SPIKES WITH DIAMOND COATINGS

被引：96

作者：

ZHIRNOV, VV

GIVARGIZOV, EI

PLEKHANOV, PS

机构：

[1] Russian Acad of Sciences, Moscow

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1995年 / 13卷 / 02期

关键词：

D O I：

10.1116/1.587960

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Diamond-coated silicon field emitters were fabricated and investigated. Emission currents of few μA per tip at voltages of several hundred volts were obtained from very blunt tips with curvature radii up to 3 μm. The values of the effective work function calculated from Fowler-Nordheim plot were in the range from 0.3 to 1.2 eV. Two models for an explanation of the experimental data are proposed.

引用

页码：418 / 421

页数：4

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