UNIFORM LARGE AREA BEAM SCANNING WITH A FREEMAN SOURCE

被引：5

作者：

KANTER, M

WITTKOWER, A

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1985年 / 6卷 / 1-2期

关键词：

D O I：

10.1016/0168-583X(85)90619-6

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：116 / 118

页数：3

相关论文

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WINNARD, JR .

NUCLEAR INSTRUMENTS & METHODS, 1976, 139 (DEC15) :41-45

[2]

Tabata O., 1983, Proceedings of the International Ion Engineering Congress. The 7th Symposium (1983 International) on Ion Sources and Ion Assisted Technology (ISIAT '83) and the 4th International Conference on Ion and Plasma Assisted Techniques (IPAT '83), P407

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