共 6 条
[1]
MARUTANI Y, 1990, GOUSEI JYUSHI, V36, P7
[2]
NARAHARA H, 1990, GOUSEI JYUSHI, V36, P11
[3]
Takagi T., 1994, Proceedings IEEE Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems (Cat. No.94CH3404-1), P211, DOI 10.1109/MEMSYS.1994.555625
[4]
Takagi T., 1993, Proceedings. IEEE. Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.93CH3265-6), P173, DOI 10.1109/MEMSYS.1993.296927
[5]
TAKAGI T, 1993, P RADTECH ASIA 93, P451
[6]
IEEE P MICRO ELECTRO