HYDROGEN COMPLEXED EP (E'DELTA) CENTERS AND EP/H-2 INTERACTIONS - IMPLICATIONS FOR EP STRUCTURE

被引：3

作者：

CONLEY, JF

LENAHAN, PM

机构：

[1] Penn State University, Dept. of ESM, Univ. Park

来源：

MICROELECTRONIC ENGINEERING | 1995年 / 28卷 / 1-4期

关键词：

D O I：

10.1016/0167-9317(95)00010-6

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Using electron spin resonance, we report the first observation of a hydrogen complexed EP center. These EP/H defects are generated by conversion of EP centers in the presence of H-2 at room temperature. By comparing EP/H centers with E gamma'/H centers, we unveil the first strong evidence that EP centers do not have a delocalized structure.

引用

页码：35 / 38

页数：4

共 16 条

[1]

Shaneyfelt, Schwank, Fleetwood, Winokur, Hughes, Sexton, IEEE Trans. NS, 37, (1990)

[2]

Kohler, Kushner, Lee, IEEE Trans. NS, 35, (1988)

[3]

Lenahan, Dressendorfer, Microstructural Variations in Radiation Hard and Soft Oxides Observed through Electron Spin Resonance, IEEE Transactions on Nuclear Science, 30, (1983)

[4]

Lenahan, Dressendorfer, J. Appl. Phys., 55, (1984)

[5]

Lipkin, Rowan, Reisman, Williams, J. Electrochem. Soc., 138, (1991)

[6]

Takahashi, Triplett, Yokogawa, Sugano, Appl. Phys. Lett., 51, (1987)

[7]

Conley, Lenahan, Appl. Phys. Lett., 62, (1993)

[8]

Conley, Lenahan, Microelec. Engr., 22, (1993)

[9]

Conley, Lenahan, IEEE Trans. NS, 40, (1993)

[10]

Conley, Lenahan, Evans, Lowry, Morthorst, J. Appl. Phys., 76, (1994)

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