DIFFUSION OF NITROGEN IN ION-IMPLANTED CHROMIUM AND TUNGSTEN

被引:24
作者
KEINONEN, J
RAISANEN, J
ANTTILA, A
机构
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1984年 / 35卷 / 04期
关键词
D O I
10.1007/BF00617172
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:227 / 232
页数:6
相关论文
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