SELF-DIFFUSION OF SI-30 AND N-15 IN ALPHA-PHASE SILICON-NITRIDE

被引：29

作者：

KUNZ, KP

SARIN, VK

DAVIS, RF

BRYAN, SR

机构：

[1] GTE LABS INC,WALTHAM,MA 02254

[2] STAND OIL ENGINEERED MAT CO,CLEVELAND,OH 44128

来源：

MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING | 1988年 / 105卷

关键词：

D O I：

10.1016/0025-5416(88)90479-X

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：47 / 54

页数：8

共 11 条

[1] KINETICS AND MECHANISM OF THERMAL-DECOMPOSITION OF SI3N4 [J].

BATHA, HD ;

WHITNEY, ED .

JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1973, 56 (07) :365-369

[2]

COOPER AR, 1979, ADA069004

[3]

DAVIS RF, 1978, MATER SCI RES, V2, P653

[4] CALCULATION OF DIFFUSION PENETRATION CURVES FOR SURFACE AND GRAIN BOUNDARY DIFFUSION [J].

FISHER, JC .

JOURNAL OF APPLIED PHYSICS, 1951, 22 (01) :74-77

[5] ON REACTIONS BETWEEN SILICON AND NITROGEN .1. MECHANISMS [J].

JENNINGS, HM .

JOURNAL OF MATERIALS SCIENCE, 1983, 18 (04) :951-967

[6]

KIJIMA K, 1976, J CHEM PHYS, V65, P2668, DOI 10.1063/1.433464

[7]

PFANN WG, 1955, T AM I MIN MET ENG, V203, P961

[8] EXACT SOLUTIONS OF 2 IDEAL CASES IN GRAIN BOUNDARY DIFFUSION PROBLEM + APPLICATION TO SECTIONING METHOD [J].

SUZUOKA, T .

JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN, 1964, 19 (06) :839-&

[9]

THUMMLER F, 1980, MATER SCI RES, V13, P247

[10]

WOLF S, 1986, SILICON PROCESSING V, P248

← 1 2 →