PARAMETRIC EFFECTS ON PLASMA EMISSION PRODUCED DURING EXCIMER LASER ABLATION OF YBA2CU3O7-X

被引：19

作者：

GEYER, TJ ^{[1
]}

WEIMER, WA ^{[1
]}

机构：

[1] USN,CTR WEAP,DEPT RES,DIV CHEM,CHINA LAKE,CA 93555

来源：

APPLIED SPECTROSCOPY | 1990年 / 44卷 / 10期

关键词：

EMISSION SPECTROSCOPY; LASERS; EXCIMER; MASS SPECTROMETRY; LASER ABLATION;

D O I：

10.1366/0003702904417454

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The effects of changes in experimental parameters on the plasma emission spectra produced during excimer laser ablation of YBa2Cu3O7 were investigated. Emission from YO is observed for low-incident laser fluences, but is absent for fluences at or above those used for thin film deposition by laser ablation. Excitation within the plasma appears to be primarily due to electron impact. The effects of incident laser fluence and ambient gas pressure on the plasma emission are distinct enough to allow adjustment of either parameter based on the observed change in the emission spectrum. Therefore, optical emission spectroscopy is well suited as a technique for in situ monitoring of the deposition of thin films by laser ablation.

引用

页码：1659 / 1664

页数：6

共 43 条

[1]

AGEEV VP, 1989, SOV PHYS TECH PHYS, V33, P562

[2] SPECTROSCOPIC ANALYSIS OF ELECTRONICALLY EXCITED SPECIES IN XECL EXCIMER LASER-INDUCED PLASMAS FROM THE ABLATED HIGH-TEMPERATURE SUPERCONDUCTOR YBA2CU3O7 [J].