MULTIPLE DETERMINATION OF THE OPTICAL-CONSTANTS OF THIN-FILM COATING MATERIALS - A RH SEQUEL

被引：20

作者：

ASPNES, DE ^{[1
]}

CRAIGHEAD, HG ^{[1
]}

机构：

[1] BELL COMMUN RES INC,HOLMDEL,NJ 07733

来源：

APPLIED OPTICS | 1986年 / 25卷 / 08期

关键词：

D O I：

10.1364/AO.25.001299

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：1299 / 1310

页数：12

共 26 条

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HART, TT ;

HO, FC ;

HODGKIN, VA ;

KLAPP, WP ;

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ASPNES, DE ;

STUDNA, AA .

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[5] HIGH PRECISION SCANNING ELLIPSOMETER [J].

ASPNES, DE ;

STUDNA, AA .

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[6] INVESTIGATION OF EFFECTIVE-MEDIUM MODELS OF MICROSCOPIC SURFACE-ROUGHNESS BY SPECTROSCOPIC ELLIPSOMETRY [J].

ASPNES, DE ;

THEETEN, JB .

PHYSICAL REVIEW B, 1979, 20 (08) :3292-3302

[7] OPTICAL-PROPERTIES OF THIN-FILMS [J].

ASPNES, DE .

THIN SOLID FILMS, 1982, 89 (03) :249-262

[8] DIELECTRIC-PROPERTIES OF HEAVILY DOPED CRYSTALLINE AND AMORPHOUS-SILICON FROM 1.5 TO 6.0 EV [J].

ASPNES, DE ;

STUDNA, AA ;

KINSBRON, E .

PHYSICAL REVIEW B, 1984, 29 (02) :768-779

[9] ANALYSIS OF CERMET FILMS WITH LARGE METAL PACKING FRACTIONS [J].

ASPNES, DE .

PHYSICAL REVIEW B, 1986, 33 (02) :677-682

[10] METHODS FOR DRIFT STABILIZATION AND PHOTOMULTIPLIER LINEARIZATION FOR PHOTOMETRIC ELLIPSOMETERS AND POLARIMETERS [J].

ASPNES, DE ;

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REVIEW OF SCIENTIFIC INSTRUMENTS, 1978, 49 (03) :291-297

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