THE USE OF LANGMUIR PROBE METHODS FOR PLASMA DIAGNOSTIC IN MIDDLE PRESSURE DISCHARGES

The article attempts to summarize the most important knowledge about the analysis of a Langmuir probe at middle pressures. First it briefly reviews the recent theories which deal with interpretation of Langmuir probe data at such conditions and then it applies the theory to the measurements in a Neon discharge at pressures 1.86 and 2.46 kPa. The charged particle density and the electron temperature obtained from the same probe data using different theories is compared against each other and a satisfactory agreement is obtained. The recommended procedure of probe data interpretation is given at the end of the paper. Copyright © 1990 WILEY‐VCH Verlag GmbH & Co. KGaA