SILICON MICROMACHINED ELECTROMAGNETIC MICROACTUATORS FOR RIGID DISK DRIVES

被引：20

作者：

TANG, WL ^{[1
]}

TEMESVARY, V ^{[1
]}

MILLER, R ^{[1
]}

DESAI, A ^{[1
]}

TAI, YC ^{[1
]}

MIU, DK ^{[1
]}

机构：

[1] CALTECH,PASADENA,CA 91125

来源：

IEEE TRANSACTIONS ON MAGNETICS | 1995年 / 31卷 / 06期

关键词：

D O I：

10.1109/20.490204

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

It is projected that by the year 2001, disk drive industry will be shipping products with track density on the order of 25,000 tracks-per-inch, which would require a servo bandwidth of at least 3 kHz. This paper presents initial fabrication results of an industry and government supported research project at Caltech and UCLA to develop piggyback electromagnetically driven microactuators for such applications, which are fabricated using the state-of-the-art silicon micromachining techniques.

引用

页码：2964 / 2966

页数：3