Application of the ionless tripod polisher to the preparation of YBCO superconducting multilayer and bulk ceramics thin films

被引:57
作者
Ayache, J [1 ]
Albarede, PH [1 ]
机构
[1] IBM FRANCE,SERV 1807 31U,F-91105 CORBEIL ESSONNES,FRANCE
关键词
D O I
10.1016/0304-3991(95)00073-8
中图分类号
TH742 [显微镜];
学科分类号
摘要
The standard method of polishing using ion milling for cross-section preparation induces atomic diffusion which can be avoided by using an ionless polisher. The present paper gives the details of the method as applied to superconducting YBa2Cu3O7 melt-textured ceramics and multilayer thin films. The structure and chemistry of interfaces in this complex system are known to be influenced by changes in the chemical composition, Because of non-stoichiometry related growth of secondary phases, many secondary phases form. We present a technique, which allows preparation of electron-transparent TEM samples, that can be used for HREM and chemical characterizations.
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页码:195 / 206
页数:12
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