SNO2 THIN-FILMS FOR GAS SENSOR PREPARED BY RF REACTIVE SPUTTERING

被引：34

作者：

DIGIULIO, M ^{[1
]}

MICOCCI, G ^{[1
]}

SERRA, A ^{[1
]}

TEPORE, A ^{[1
]}

RELLA, R ^{[1
]}

SICILIANO, P ^{[1
]}

机构：

[1] CNR,IME,IST STUDIO NUOVI MAT ELETTRON,I-73100 LECCE,ITALY

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 1995年 / 25卷 / 1-3期

关键词：

GAS SENSORS; THIN FILMS; TIN OXIDE;

D O I：

10.1016/0925-4005(94)01397-7

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

SnO2 thin films have been grown by means of the r.f. reactive sputtering method in order to be used as gas sensors. The films are deposited onto heated alumina substrates in an Ar-O-2 atmosphere starting from an SnO2 target. We have optimized the growth parameters in order to achieve the best thin-film properties. The surface structure and the composition of the prepared films are investigated by X-ray diffraction and X-ray photoelectron spectroscopy. The effect on the gas-sensing characteristics of dispersing platinum onto the film surface by sputtering from a Pt target followed by a suitable thermal annealing, has also been studied. In particular, Pt-added SnO2 thin films show a high sensitivity to carbon monoxide gas at temperatures of about 170 degrees C. This temperature is lower than the optimum operating temperature (about 350 degrees C) of SnO2 samples without platinum.

引用

页码：465 / 468

页数：4

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