STRUCTURAL REACTIONS OF SI(111) WITH COBALT AND FORMATION OF COBALT DISILICIDE

被引：27

作者：

WU, SC

WANG, ZQ

LI, YS

JONA, F

MARCUS, PM

机构：

[1] SUNY STONY BROOK,COLL ENGN & APPL SCI,STONY BROOK,NY 11794

[2] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598

来源：

PHYSICAL REVIEW B | 1986年 / 33卷 / 04期

关键词：

D O I：

10.1103/PhysRevB.33.2900

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：2900 / 2902

页数：3

共 13 条

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[4]

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[10] GROWTH OF SINGLE-CRYSTAL COSI2 ON SI (111) [J].

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