COMPRESSIVE STRESS OF THIN CUBIC BN FILMS PREPARED BY R.F. REACTIVE SPUTTERING ON R.F.-BIASED SUBSTRATES

被引：21

作者：

GORANCHEV, B

SCHMIDT, K

REICHELT, K

机构：

来源：

THIN SOLID FILMS | 1987年 / 149卷 / 01期

关键词：

D O I：

10.1016/0040-6090(87)90256-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：L77 / L80

页数：4

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共 8 条

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[8] FACTORY DESCRIPTION