SILANE FORMATION ON SILICON - REACTION-KINETICS AND SURFACE-ANALYSIS

被引：35

作者：

FRANK, TC ^{[1
]}

FALCONER, JL ^{[1
]}

机构：

[1] UNIV COLORADO,DEPT CHEM ENGN,BOULDER,CO 80309

来源：

关键词：

D O I：

10.1021/la00061a017

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

引用

页码：104 / 110

页数：7

共 23 条

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FERRON, J ;

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[5]

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[6]

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[7]

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FRANK, TC ;

FALCONER, JL .

APPLICATIONS OF SURFACE SCIENCE, 1983, 14 (3-4) :359-374

[9]

FRANK TC, J CATAL

[10]

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