THE PASSIVATION OF ELECTRICALLY ACTIVE-SITES ON THE SURFACE OF CRYSTALLINE SILICON BY FLUORINATION

被引：44

作者：

WEINBERGER, BR

DECKMAN, HW

YABLONOVITCH, E

GMITTER, T

KOBASZ, W

GAROFF, S

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 03期

关键词：

D O I：

10.1116/1.573340

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：887 / 891

页数：5

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