ULTRAHIGH VACUUM STATION FOR THIN FILM AND RESIDUAL GAS ANALYSIS STUDIES

被引：9

作者：

ROZGONYI, GA

POLITO, WJ

SCHWARTZ, B

机构：

来源：

VACUUM | 1966年 / 16卷 / 03期

关键词：

D O I：

10.1016/0042-207X(66)93574-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：121 / &

相关论文

共 6 条

[1] CASWELL HL, 1963, PHYS THIN FILMS, V1, P1
[2] HASS G, 1963, PHYSICS THIN FILM ED, V1, P1
[3] SUPERCONDUCTING TANTALUM FILMS
HAUSER, JJ
THEUERER, HC
[J]. REVIEWS OF MODERN PHYSICS, 1964, 36 (1P1) : 80 - &
[4] ADSORPTION-DESORPTION OF RESIDUAL GASES IN HIGH VACUUM
LICHTMAN, D
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1965, 2 (02): : 70 - &
[5] MASS PEAKS FROM ADSORBED GASES IN A SINGLE-FOCUSING MASS SPECTROMETER
ROBINS, JL
[J]. CANADIAN JOURNAL OF PHYSICS, 1963, 41 (08) : 1385 - &
[6] GETTER SPUTTERING FOR PREPARATION OF THIN FILMS OF SUPERCONDUCTING ELEMENTS + COMPOUNDS
THEUERER, HC
HAUSER, JJ
[J]. JOURNAL OF APPLIED PHYSICS, 1964, 35 (3P1) : 554 - &