LASER DOPPLER ANEMOMETRY UNDER PLASMA CONDITIONS .2. MEASUREMENTS IN AN INDUCTIVELY COUPLED RF PLASMA

被引:12
作者
LESINSKI, J [1 ]
BOULOS, MI [1 ]
机构
[1] UNIV SHERBROOKE,DEPT CHEM ENGN,SHERBROOKE J1K 2R1,QUEBEC,CANADA
关键词
D O I
10.1007/BF01016153
中图分类号
TQ [化学工业];
学科分类号
0817 ;
摘要
引用
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页码:133 / 144
页数:12
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