KINETICS AND MECHANISMS IN CVD OF BORON

[1] CARLSSON JO, 1985, 8TH P INT C VAC MET, P257

[2] CARLTON HE, 1970, 2ND P INT C CHEM VAP, P25

[3] GRUBER PE, 1970, 2ND P INT C CHEM VAP, P209

[4] JANSSON U, UNPUB

[5] MEHALSO RM, 1975, 5TH P INT C CHEM VAP, P84

[6] TANAKA H, 1987, 10TH P INT C CVD, P155

[7] Structure of Deposits-Process Relationships in the Chemical Vapor Deposition of Boron [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1977, 124 (12) : 1937 - 1942

[8] 1981, GMELIN HDB INORGANIC, V2

[1] CARLSSON JO, 1985, 8TH P INT C VAC MET, P257

[2] CARLTON HE, 1970, 2ND P INT C CHEM VAP, P25

[3] GRUBER PE, 1970, 2ND P INT C CHEM VAP, P209

[4] JANSSON U, UNPUB

[5] MEHALSO RM, 1975, 5TH P INT C CHEM VAP, P84

[6] TANAKA H, 1987, 10TH P INT C CVD, P155

[7] Structure of Deposits-Process Relationships in the Chemical Vapor Deposition of Boron [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1977, 124 (12) : 1937 - 1942

[8] 1981, GMELIN HDB INORGANIC, V2