ETCHING OF METALS BY MEANS OF ORGANIC RADICALS

被引：12

作者：

HAAG, C

SUHR, H

机构：

来源：

PLASMA CHEMISTRY AND PLASMA PROCESSING | 1986年 / 6卷 / 03期

关键词：

D O I：

10.1007/BF00575128

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

引用

页码：197 / 203

页数：7

共 20 条

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