SURFACE-TOPOGRAPHY OF SPUTTERED CUXMO6S8 FILMS

被引:7
作者
OHTAKI, R [1 ]
ZHAO, BR [1 ]
LUO, HL [1 ]
DAVIS, NM [1 ]
机构
[1] USN,CTR OCEAN SYST,DIV ELECTR MAT SCI,SAN DIEGO,CA 92152
关键词
D O I
10.1016/0025-5408(82)90038-1
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:575 / 578
页数:4
相关论文
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